JPH0115209B2 - - Google Patents
Info
- Publication number
- JPH0115209B2 JPH0115209B2 JP11444982A JP11444982A JPH0115209B2 JP H0115209 B2 JPH0115209 B2 JP H0115209B2 JP 11444982 A JP11444982 A JP 11444982A JP 11444982 A JP11444982 A JP 11444982A JP H0115209 B2 JPH0115209 B2 JP H0115209B2
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- oxide thin
- thin film
- vibrator
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical class [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 78
- 239000011787 zinc oxide Substances 0.000 claims description 39
- 239000010409 thin film Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444982A JPS595724A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
| US06/509,028 US4445066A (en) | 1982-06-30 | 1983-06-29 | Electrode structure for a zinc oxide thin film transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444982A JPS595724A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS595724A JPS595724A (ja) | 1984-01-12 |
| JPH0115209B2 true JPH0115209B2 (en]) | 1989-03-16 |
Family
ID=14638007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11444982A Granted JPS595724A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595724A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3379049B2 (ja) * | 1993-10-27 | 2003-02-17 | 富士通株式会社 | 表面弾性波素子とその製造方法 |
-
1982
- 1982-06-30 JP JP11444982A patent/JPS595724A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS595724A (ja) | 1984-01-12 |
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